Full-time Faculty
Chin-Kai ChangChin-Kai Chang
Job_title
Associate Professor
Education
Ph.D, Institute of Applied Mechanics, National Taiwan University
E-mail
Phone
Office(62179)
Lab
Office(91615) Laboratory(91909)
Expertise
Nano-Optics、Micro/Nano Fabrication Technology、Opto-Mechanical Systems
Experience
Education
Ph.D. Institute of Applied Mechanics, National Taiwan University, 2009/07.
Ph.D. Institute of Applied Mechanics, National Taiwan University, 2009/07.
B.S. Mechanical Engineering, National Taiwan University, 2004/06.
Experiences
Material and Chemical Research Laboratories, Industrial Technology Research Institute, 2009/09~2013/09
Functional Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, Netherlands, 2011/09~2012/04
Nano Patterning Technology Division, Taiwan Semiconductor Manufacturing Company, 2013/09~2020/02
Department of Mechanical Engineering, National Cheng Kung University, 2020/02~
Experiences
Material and Chemical Research Laboratories, Industrial Technology Research Institute, 2009/09~2013/09
Functional Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, Netherlands, 2011/09~2012/04
Nano Patterning Technology Division, Taiwan Semiconductor Manufacturing Company, 2013/09~2020/02
Department of Mechanical Engineering, National Cheng Kung University, 2020/02~
Academic expertise
Optical metrology, Nano-Fabrication, Opto-Mechanical Systems, Nano-Optics
Research areas
Metalens, Plasmonic Optics, Lithography, Micro/Nano-Fabrication Technology
Main courses
Mechanics of Materials (1)
Introduction to Computers
Experiments in Mechanical Engineering (2)
Introduction to Electromagnetism
Processing Technology and Equipment for Advanced Semiconductor Manufacturing
Introduction to Computers
Experiments in Mechanical Engineering (2)
Introduction to Electromagnetism
Processing Technology and Equipment for Advanced Semiconductor Manufacturing
Publication
Recent 5 years
Peer-Reviewed Journals (* corresponding author)
1. C. K. Chang*, R. W. Hsu, and D. Z. Lin, “Enhancement of focusing properties of Bessel-like beam by metallic surface nanostructure”. Applied Physics Express 15, 072001 (2022). (IF 2.82, Rank 48.4% in Applied Physics)
2. C. K. Chang*, and W. T. Yeh, “Beaming effect of the plasmonic metalens structured with concentric elliptical nanohole arrays”. Optical Materials 134, 113084 (2022). (IF 3.75, Rank 28.7% in Optics)
3. C. K. Chang*, and C. H. Wei, “Polarization-switchable focal vortex beam by an Archimedean array”. Optics Express 31(6), 9915~9922 (2023). (IF 3.83, Rank 27.7% in Optics)
4. C. K. Chang*, and W. T. Yeh, “Wavefront engineering based on hybrid plasmonic mode”. Optics and Lasers in Engineering 167, 107605 (2023). (IF 5.67, Rank 17.8% in Optics)
5. C. K. Chang*, and T. H. Huang, “Enhancement of photothermal effect using a hierarchical plasmonic structure”. Applied Surface Science 638, 158034 (2023). (IF 7.39, Rank 5% in Materials Science, Coatings and Films)
6. C. K. Chang*, and H. Y. Chien, “Improvements in patterning quality and fidelity in plasmonic lithography incorporating optical proximity correction”. Optics and Laser Technology 174, 110653 (2024). (IF 5.00, Rank 18% in Optics)
7. C. K. Chang*, and C. W. Yang, “Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network”. Optics Express 32(5), 8389-8396 (2024). (IF 3.8, Rank 30% in Optics)
Conference Papers (* corresponding author)
C. H. Wei, and C. K. Chang*, “Generation of optical vortex by plasmonic metalens for beam shaping,” The 12th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2022), Paper ID 1738, Torremolinos, Spain (19-22 July 2022).
Peer-Reviewed Journals (* corresponding author)
1. C. K. Chang*, R. W. Hsu, and D. Z. Lin, “Enhancement of focusing properties of Bessel-like beam by metallic surface nanostructure”. Applied Physics Express 15, 072001 (2022). (IF 2.82, Rank 48.4% in Applied Physics)
2. C. K. Chang*, and W. T. Yeh, “Beaming effect of the plasmonic metalens structured with concentric elliptical nanohole arrays”. Optical Materials 134, 113084 (2022). (IF 3.75, Rank 28.7% in Optics)
3. C. K. Chang*, and C. H. Wei, “Polarization-switchable focal vortex beam by an Archimedean array”. Optics Express 31(6), 9915~9922 (2023). (IF 3.83, Rank 27.7% in Optics)
4. C. K. Chang*, and W. T. Yeh, “Wavefront engineering based on hybrid plasmonic mode”. Optics and Lasers in Engineering 167, 107605 (2023). (IF 5.67, Rank 17.8% in Optics)
5. C. K. Chang*, and T. H. Huang, “Enhancement of photothermal effect using a hierarchical plasmonic structure”. Applied Surface Science 638, 158034 (2023). (IF 7.39, Rank 5% in Materials Science, Coatings and Films)
6. C. K. Chang*, and H. Y. Chien, “Improvements in patterning quality and fidelity in plasmonic lithography incorporating optical proximity correction”. Optics and Laser Technology 174, 110653 (2024). (IF 5.00, Rank 18% in Optics)
7. C. K. Chang*, and C. W. Yang, “Retrieving profile of photoresist with high aspect ratio and subwavelength features using optical spectroscopy and artificial neural network”. Optics Express 32(5), 8389-8396 (2024). (IF 3.8, Rank 30% in Optics)
Conference Papers (* corresponding author)
C. H. Wei, and C. K. Chang*, “Generation of optical vortex by plasmonic metalens for beam shaping,” The 12th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2022), Paper ID 1738, Torremolinos, Spain (19-22 July 2022).
Phone
Fax
886-6-2352973
E-mail
Address
No.1, University Road,Tainan City
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